The 61st JSAP Spring Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E14 (E302)

10:30 AM - 10:45 AM

[18a-E14-6] Dynamic characteristic profiling of nano- and micromechanical resonator using scanning electron microscope

○Reo Kometani1, Kazuhiro Nakano1, Sunao Ishihara1, Shinichi Warisawa1 (The Univ. of Tokyo1)

Keywords:振動,NEMS,計測