The 61st JSAP Spring Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E14 (E302)

11:15 AM - 11:30 AM

△ [18a-E14-9] Development of graphene MEMS resonator for high sensitivity mass sensor

○Ryota Ohashi1, Kazuhiro Takahashi1,2, Makoto Ishida1, Kazuaki Sawada1,2 (Toyohashi Univ. of Tech.1, JST-CREST2)

Keywords:MEMS,Graphene,resonator