The 61st JSAP Spring Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[18a-E5-1~8] 15.6 IV-group-based compounds

Tue. Mar 18, 2014 9:30 AM - 11:45 AM E5 (E105)

9:30 AM - 9:45 AM

[18a-E5-1] Comprehensive understanding of 4H-SiC surface oxidation reaction mechanisms at various conditions

○Koji Kita1,2, Richard Heihachiro Kikuchi1, Hirohisa Hirai1 (Univ. of Tokyo1, JST-PRESTO2)

Keywords:熱酸化,成長機構,SiC