[18a-E5-1~8] 15.6 IV-group-based compounds

[18a-E5-6] The influence of XY resolution to optical microscopy on SiC substrate surface

^○Kentaro Tamura^1,3, Hideki Sako^1,4, Masayuki Sasaki^1,5, Tamotu Yamashita^1,6, Hirokuni Asamizu^1,3, Sachiko Ito², Kazutoshi Kojima^1,2, Masatake Nagaya^1,7, Takanori Kido^1,6, Makoto Kitabatake^1,8, Kenji Kawata^1,2, Tomohisa Kato^1,2 (FUPET¹, AIST², Rohm³, Toray Research Center⁴, NSSMC⁵, Showa Denko⁶, Denso⁷, Panasonic⁸)

Keywords:ステップバンチング,水素エッチング,表面ダメージ