The 61st JSAP Spring Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[18a-E5-1~8] 15.6 IV-group-based compounds

Tue. Mar 18, 2014 9:30 AM - 11:45 AM E5 (E105)

11:15 AM - 11:30 AM

[18a-E5-7] Study on formation of dislocation contrast in 4H-SiC wafer in mirror projection electron microscopy image

○Toshiyuki Isshiki1, Masaki Hasegawa2 (Kyoto Inst. Tech.1, Hitachi, Central Research Lab.2)

Keywords:欠陥評価,ミラー電子顕微鏡,SiC