[18a-F5-1~11] 7.2 Electron microscopes, evaluation, measurement and analysis

△ [18a-F5-11] Ionization of sputtered particles and its angular distribution

^○Toma Yorisaki¹, Reiko Saito¹, Haruko Akutsu² (Toshiba Corporate Manufacturing and Engineering Center¹, Toshiba Semiconductor and Storage products Company²)

Keywords:二次中性粒子質量分析法