The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

[18a-F6-1~12] 15.5 IV-group crystals and IV-IV-group mixed crystals

Tue. Mar 18, 2014 9:00 AM - 12:15 PM F6 (F306)

11:15 AM - 11:30 AM

[18a-F6-9] Electrical characteristics of Ge-on-insulator MOSFETs fabricated by lateral liquid-phase epitaxy on Y2O3 BOX layer

Keiko Kajimura1, Masahiro Matsue1, Takuji Hosoi1, Takayoshi Shimura1, Heiji Watanabe1 (Osaka Univ.1)

Keywords:LLPE,GOI