The 61st JSAP Spring Meeting, 2014

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Poster presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[18a-PA3-1~2] 7.3 Lithography

Tue. Mar 18, 2014 9:30 AM - 11:30 AM PA3 (アリーナ)

9:30 AM - 11:30 AM

[18a-PA3-1] A Molecular Simulation of Electron Beam Lithography (2)

Katsushi Michishita1, ○Masaaki Yasuda1, Hiroaki Kawata1, Yoshihiko Hirai1 (Osaka Pref. Univ.1)

Keywords:電子線リソグラフィ,分子動力学法,ラインエッジラフネス