Oral presentation
[18p-F2-1~13] 7.3 Lithography
Tue. Mar 18, 2014 2:00 PM - 5:45 PM F2 (F204)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
2:00 PM - 2:30 PM
○Tetsuo Harada1,2, Takeo Watanabe1,2, Hiroo Kinoshita1,2 (Univ. of Hyogo1, CREST/JST2)
2:30 PM - 2:45 PM
○(M1)Kazuya Emura1, Takeo Watanabe1, Masato Yamaguchi1, Hirohito Tanino1, Tsubasa Hukui1, Daiju Siono2, Yuichi Haruyama1, Yasuji Muramatu1, Katsumi Ohmori2, Kazufumi Sato2, Tetsuo Harada1, Hiroo Kinoshita1 (Univ. of Hyogo1, Tokyo Ohka2)
2:45 PM - 3:00 PM
○masato yamaguchi1, kazuya emura1, tsubasa hukui1, hirohito tanino1, tetsuo harada1, takeo watanabe1, hiroo kinosita1, ryoiti hosino2 (Univercity of Hyogo1, Gluon Lab2)
3:00 PM - 3:15 PM
Ryuichi Wakatsuki1, Yusuke Noto1, ○Takashi Nishiyama1, Eriko Sato2, Hideo Horibe2 (Kanazawa Inst. Tech.1, Grad. Sch. of Eng., Osaka City Univ.2)
3:15 PM - 3:30 PM
Yosuke Goto1, Hitomi Kitamura1, ○Takashi Nishiyama1, Kunihiko Koike2, Hideo Horibe3 (Kanazawa Inst. Tech.1, Iwatani Corp.2, Osaka City Univ.3)
3:30 PM - 3:45 PM
○Toru Yamaguchi1, Akira Fujiwara1 (NTT BRL1)
Break 15:45〜16:00 (3:45 PM - 4:00 PM)
4:00 PM - 4:15 PM
○Naoki Ueda1, Masaru Sasago1, Hisao Kikuta1, Hiroaki Kawata1, Yoshihiko Hirai1 (Osaka Pref Univ1)
4:15 PM - 4:30 PM
○Naoki Ueda1, Masaru Sasago1, Hisao Kikuta1, Hiroaki Kawata1, Yoshihiko Hirai1 (Osaka Pref Univ1)
4:30 PM - 4:45 PM
○Toshiyuki Horiuchi1, Naoki Takada2, Hiroshi Kobayashi1 (Tokyo Denki Univ.1, Grad. Sch. Eng., Tokyo Denki Univ.2)
4:45 PM - 5:00 PM
○Yoshinobu Watabe1, Masato Moriya1, Takahito Kumazaki1, Hiroaki Tsushima1, Akihiko Kurosu1, Takeshi Ohta1, Kouji Kakizaki1, Takashi Matsunaga1, Hakaru Mizoguchi1 (GIGAPHOTON INC.1)
5:00 PM - 5:15 PM
○Akira Suwa1, Hiroyuki Ikeda1, Hisakazu Katsuumi1, Takeshi Asayama1, Hiroaki Tsushima1, Takahito Kumazaki1, Akihiko Kurosu1, Takeshi Ohta1, Kouji Kakizaki1, Takashi Matsunaga1, Hakaru Mizoguchi1 (Gigaphoton1)
5:15 PM - 5:30 PM
○Naokatsu Ikegami1, Akira Kojima1,3, Takashi Yoshida2, Hitoshi Nishino2, Shinya Yoshida2, Hiroshi Miyaguchi2, Masanori Muroyama2, Hideyuki Ohyi3, Nobuyoshi Koshida1, Masayoshi Esashi2 (Tokyo Univ. of Agri. & Tech.1, Tohoku Univ.2, CRESTEC3)
5:30 PM - 5:45 PM
○Kenji Yamazaki1, Hiroshi Yamaguchi1 (NTT Basic Research Labs.1)