The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[18p-F2-1~13] 7.3 Lithography

Tue. Mar 18, 2014 2:00 PM - 5:45 PM F2 (F204)

4:15 PM - 4:30 PM

[18p-F2-8] Built-in lens mask lithography -Experimental study-

○Naoki Ueda1, Masaru Sasago1, Hisao Kikuta1, Hiroaki Kawata1, Yoshihiko Hirai1 (Osaka Pref Univ1)

Keywords:フォトリソグラフィ,複素振幅,マスク