[18p-D6-1~19] 6.2 Carbon-based thin films

△ [18p-D6-12] The valuation of surface potential for heavily doped n-type diamond semiconductors by Kelvin probe force microscopy

^○Kazuya Shirota^1,2,3, Daisuke Takeuchi^2,3, Masahiko Ogura^2,3, Hiromitsu Kato^2,3, Toshiharu Makino^2,3, Hideyo Okushi^2,3, Satoshi Yamasaki^1,2,3 (Tsukuba Univ.¹, AIST², CREST³)

Keywords:ダイヤモンド,ケルビンプローブ顕微鏡,表面準位