[18p-D6-1~19] 6.2 Carbon-based thin films

[18p-D6-18] Misorientation angle dependence of homoepitaxial growth on (001) phosphorus-doped n-type diamond

^○Hiroyuki Kawashima^1,3, hiromitsu Kato^1,3, Masahiko Ogura^1,3, Mariko Suzuki^1,2,3, Toshiharu Makino^1,3, Daisuke Takeuchi^1,3, Satoshi Yamasaki^1,3 (AIST¹, Toshiba Corp.², JST-CREST³)

Keywords:ダイヤモンド,結晶成長,オフ角依存性