Structural analysis of InGaZnO Ⅲ：Crystal structure analysis of CAAC-InGaZnO thin film

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Tue. Mar 18, 2014 1:15 PM - 6:30 PM E10 (E204)

2:45 PM - 3:00 PM

^○Masayuki Funaki¹, Toru Yamazaki¹, Keiko Akutsu¹ (MST¹)

Keywords:InGaZnO,構造解析,TEM