[18p-E12-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

▲ [18p-E12-17] Formation of a-Si:H films from cyclopentasilane by using parallel deposition system at atmospheric pressure

^○Zhongrong Shen^1,2, Takashi Masuda^1,3, Hideyuki Takagishi^1,2, Keisuke Ohdaira^1,2,3, Tatsuya Shimoda^1,2,3 (JAIST¹, JST-ALCA², JAIST GDRC³)

Keywords:cyclopentasilane,atmospheric pressure,amorphous silicon