[18p-E12-1~21] 16.3 Bulk, thin-film and other silicon-based solar cells

[18p-E12-8] Diameter Reduction of Silicon Nanowire Arrays by Ozone Oxidation

^○（B）Eiichi Ishida¹, Yasuharu Yamada², Shinya Kato⁵, Yasuyoshi Kurokawa^2,4, Akira Yamada^2,3 (Dept. of Electrical and Electronic Engineering, Tokyo Tech¹, Dept. of Physical Electronics, Tokyo Tech², PVREC, Tokyo Tech³, JST-PRESTO⁴, JST-FUTURE-PV⁵)

Keywords:シリコンナノワイヤ