The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18p-E13-1~18] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 1:00 PM - 6:15 PM E13 (E301)

5:00 PM - 5:15 PM

[18p-E13-14] HVPE growth and characterization of ScN epilayers

○Yuichi Oshima1, Garcia Villora1, Kiyoshi Shimamura1 (Natianal Institute for Materials Science1)

Keywords:HVPE,窒化スカンジウム