The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[18p-E13-1~18] 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 1:00 PM - 6:15 PM E13 (E301)

5:15 PM - 5:30 PM

[18p-E13-15] Structural and mechanical characterization of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)—N2-flow rate effects

Masao Noma1, koji Eriguchi2, shigehiko Hasegawa3 (SHINKO SEIKI. Co., LTD1, Kyoto University2, Osaka University3)

Keywords:BN,RePAC