Structural and mechanical characterization of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)—N2-flow rate effects

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

Tue. Mar 18, 2014 1:00 PM - 6:15 PM E13 (E301)

5:15 PM - 5:30 PM

^○Masao Noma¹, koji Eriguchi², shigehiko Hasegawa³ (SHINKO SEIKI. Co., LTD¹, Kyoto University², Osaka University³)

Keywords:BN,RePAC