The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

5:00 PM - 5:15 PM

[18p-E14-15] Exploration of catalysts for solar grade silica reduction process

Takuya Ogasawara1, Abd Erahamane Boucetta1, Hiroyuki Sato1, Yasubumi Furuya1, Masatomo Sumiya2, Hideomi Koinuma3, Kenji Itaka1 (Hirosaki Univ.1, NIMS2, Univ. Tokyo3)

Keywords:シリカ,還元,触媒