[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

△ [18p-E14-15] Exploration of catalysts for solar grade silica reduction process

^○Takuya Ogasawara¹, Abd Erahamane Boucetta¹, Hiroyuki Sato¹, Yasubumi Furuya¹, Masatomo Sumiya², Hideomi Koinuma³, Kenji Itaka¹ (Hirosaki Univ.¹, NIMS², Univ. Tokyo³)

Keywords:シリカ,還元,触媒