The 61st JSAP Spring Meeting, 2014

Session information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Lunch 11:45〜13:15 (11:45 AM - 1:15 PM)

2:45 PM - 3:00 PM

Ryuhei Hayashi1, Hirokazu Nakazawa1, Yuusuke Nishimura1, Makoto Ishida1, Kazuaki Sawada1, Hiromu Ishii1, Katsuyuki Machida2,3, Kazuya Masu2, Kenichirou Iida4, Mitumasa Saito4, Shinichi Yoshida4 (Toyohashi Univ. of Technology1, Tokyo Institute of Technology2, NTT-AT3, Graduate School of Medical Sciences, Kyushu Univ.4)

Break 16:00〜16:15 (4:00 PM - 4:15 PM)