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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Tue. Mar 18, 2014 1:15 PM - 6:45 PM E14 (E302)

3:00 PM - 3:15 PM

[18p-E14-8] Improvement of Fluorescence Detection Sensitivity for Bacterial Sensor using Microbeads

^○ＹｕｓｕｋｅＮｉｓｈｉｍｕｒａ¹ (Toyohashi Univ. of Technology¹)

Keywords:MEMS