[18p-E2-1~18] 17.1 Growth technology

[18p-E2-9] Plasma CVD apparatus with infrared-light LEDs

^○Naruki Mori¹, Shigeru Yamauchi², Takao Komiyama¹, Yasunori Chonan¹, Hiroyuki Yamaguchi¹, Takashi Aoyama¹ (Akita Prefectural Univ¹, Akita Prefectural Univ Institute of Wood Technology²)

Keywords:プラズマCVD,グラフェン,赤外光