The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.3 Lithography

[18p-F2-1~13] 7.3 Lithography

Tue. Mar 18, 2014 2:00 PM - 5:45 PM F2 (F204)

4:30 PM - 4:45 PM

[18p-F2-9] Patterning Homogeneity of Projection Lithography Using a Gradient Index Lens Array

○Toshiyuki Horiuchi1, Naoki Takada2, Hiroshi Kobayashi1 (Tokyo Denki Univ.1, Grad. Sch. Eng., Tokyo Denki Univ.2)

Keywords:リソグラフィ,投影露光,屈折率分布型レンズアレイ