[18p-F3-1~19] 7.4 Nanoimprint

[18p-F3-16] Simulation study on template releasing process based on fracture dynamics in nanoimprint lithography

Takahiro Shiotsu^1,2, Syuuua Ooi³, Youichi Watanabe³, Kimiaki Uemura^1,2, Takamitsu Tochino¹, Masaaki Yasuda^1,2, Hiroaki Kawata^1,2, Takuya Kobayashi³, ^○Yoshihiko Hirai^1,2 (Osaka prefecture university¹, JST-CREST², Mechanical design Co.³)

Keywords:ナノインプリント,離型,シミュレーション