Novel of the low defects releasing procedure for nanoimprint

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

6:30 PM - 6:45 PM

Takuya Kitagawa¹, ^○Naoto Nakamura¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yosihiko Hirai¹ (Osaka Pref Univ¹)

Keywords:ナノインプリント,離型,欠陥