[18p-F3-1~19] 7.4 Nanoimprint

[18p-F3-19] Surface Energy Modification by use of segregation agent for UV- resist in NIL

^○Naoto Nakamura¹, Tsuneo Yamashita², Takuya Kitbag sea¹, Hiroyuki Kawata¹, Yosihiko Hirai¹ (Osaka Pref Univ¹, Daikin²)

Keywords:ナノインプリント,離型,界面エネルギー