[18p-F3-1~19] 7.4 Nanoimprint

[18p-F3-3] Investigation of UV nanoimprint lithography processes for fabricating sub-100 nm Au nanostructures

^○Takuya Uehara¹, Shoichi Kubo¹, Masaru Nakagawa¹ (IMRAM, Tohoku Univ.¹)

Keywords:光ナノインプリントリソグラフィ