[18p-F3-1~19] 7.4 Nanoimprint

[18p-F3-2] Fabrication of few tens nm Si nanoguide structures using UV-NIL toward obtaining sub-ten nm nanostructures

^○Azusa Hattori¹, Shunya Ito², Masaru Nakagawa², Hidekazu Tanaka¹ (ISIR, Osaka Univ.¹, IMRAM, Tohoku Univ.²)

Keywords:光ナノインプリント,シングルナノパターニング