The 61st JSAP Spring Meeting, 2014

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07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[18p-F3-1~19] 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

2:30 PM - 2:45 PM

[18p-F3-3] Investigation of UV nanoimprint lithography processes for fabricating sub-100 nm Au nanostructures

○Takuya Uehara1, Shoichi Kubo1, Masaru Nakagawa1 (IMRAM, Tohoku Univ.1)

Keywords:光ナノインプリントリソグラフィ