Anisotropic Wet Etching for Soda-lime Glass Using Corona Discharge Treatment

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Tue. Mar 18, 2014 2:00 PM - 7:00 PM F3 (F301)

3:00 PM - 3:15 PM

^○Daisuke Sakai¹, Takao Nishiura², Satoshi Kakuta², Junji Nishii¹ (RIES Hokkaido Univ.¹, Maruzen Petrochemical Co.,LTD.²)

Keywords:コロナ放電,ウェットエッチング,ナノインプリント