[18p-F5-1~17] 1.9 Ultrasonic

[18p-F5-15] Development of ball SAW sensor system for trace moisture measurement

^○Toshihiro Tsuji¹, Satoshi Hagihara¹, Toshihiro Ohba¹, Hidekazu Koshimizu¹, Toru Oizumi¹, Nobuo Takeda¹, Shingo Akao^1,2, Tsuneo Ohgi², Kosuke Takayanagi², Yanagisawa Takayuki², Noritaka Nakaso², Yusuke Tsukahara², Kazushi Yamanaka¹ (Tohoku Univ.¹, TOPPAN PRINTING Co., LTD.²)

Keywords:SAW sensor,trace moisture,sol-gel SiOx