Electrical characterization of wafer-bonded GeOI substrates with inserted Al<sub>2</sub>O<sub>3</sub> layers

Presentation information

Oral presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

Tue. Mar 18, 2014 1:30 PM - 6:45 PM F6 (F306)

4:30 PM - 4:45 PM

^○Keisuke Yoshida¹, Yoshiaki Nakamura¹, Shotaro Takeuchi¹, Yoshihiko Moriyama^1,2, Tsutomu Tezuka², Akira Sakai¹ (Osaka Univ.¹, GNC-AIST²)

Keywords:GeOI