[18p-F6-1~20] 15.5 IV-group crystals and IV-IV-group mixed crystals

△ [18p-F6-13] Low-Temperature Cryastallization of SiGe Multilayer by Soft X-ray Irradiation

^○（M1）Fumito Kusakabe¹, Yuki Maruyama¹, Akira Heya¹, Naoto Matsuo¹, Kazuhiro Kanda², Takayasu Mochizuki², Kazuhiro Ito³, Makoto Takahashi³ (Univ. of Hyogo¹, LASTI Univ. of Hyogo², Osaka Univ³)

Keywords:軟Ｘ線,低温結晶化,透過型電子顕微鏡