[18p-PA6-1~5] 8.2 Plasma measurements and diagnostics

[18p-PA6-4] Effects of Substrate Temperature on Photoluminescence of GaN Films Immersed in Plasmas

Daisuke Ogawa¹, Yoshitaka Nakano¹, ^○Keiji Nakamura¹ (Chubu Univ.¹)

Keywords:プラズマダメージ,フォトルミネッセンス,窒化ガリウム