[18p-PG10-1~7] 9.3 Nanoelectronics

△ [18p-PG10-3] Analysis of wire rupturing process to apply the electromigration to nanostructure fabrication techniques

^○（D）Yosuke Murakami¹, Masashi Arita¹, Yasuo Takahashi¹ (Graduate School of IST, Hokkaido Univ.¹)

Keywords:エレクトロマイグレーション,ナノギャップ,透過型電子顕微鏡