[18p-PG10-1~7] 9.3 Nanoelectronics

[18p-PG10-6] Fabrication of Series-Connected Nanogaps by Field-Emission-Induced Electromigration with High Preset Current Bias

^○Kohei Morihara¹, Mitsuki Ito¹, Ryutaro Suda¹, Takahiro Toyonaka¹, Kazuki Takikawa¹, Jun-ichi Shirakashi¹ (Tokyo Univ. of Agr. & Tech.¹)

Keywords:ナノギャップ,集積化,エレクトロマイグレーション