[18p-PG10-1~7] 9.3 Nanoelectronics

[18p-PG10-7] In-Situ Imaging of Structural Change of Nanochannel during Electromigration by Atomic Force Microscopy

^○Mamiko Yagi¹, Ryutaro Suda¹, Takanari Saito¹, Jun-ichi Shirakashi¹ (Tokyo Univ. of Agr. & Tech.¹)

Keywords:ナノギャップ,エレクトロマイグレーション,原子間力顕微鏡法