[18p-PG7-1~2] 15.7 Fundamentals of epitaxy

[18p-PG7-2] Temperature dependence on growth rate of Ga2O3 layers grown by mist CVD

^○Keisuke Tanuma¹, Mayuka Sugimoto¹, Takumi Hatakeyama¹, Takeyoshi Onuma^1,2, Tomohiro Yamaguchi¹, Tohru Honda¹ (Kogakuin Univ.¹, Tokyo National College of Tech²)

Keywords:ミストCVD