[18p-PG7-1~2] 15.7 Fundamentals of epitaxy

[18p-PG7-1] Two-dimensional nucleation at stacking fault of step source in GaAs microchannel epitaxy

^○Masafumi Tomita¹, Hiroyuki Takakura¹, Muneki Iwakawa¹, Yosuke Mizuno¹, Junpei Yamada¹, Daisuke Knabayashi¹, Shigeya Naritsuka¹, Takahiro Maruyama¹ (Meijo Univ.¹)

Keywords:LPE,MCE,GaAs