The 61st JSAP Spring Meeting, 2014

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[19a-D2-1~11] 16.2 Processing technologies and devices

Wed. Mar 19, 2014 9:30 AM - 12:30 PM D2 (D113)

11:15 AM - 11:30 AM

[19a-D2-7] The formation of thin poly-Si films on textured TCO films by flash lamp annealing

○Taiki Watanabe1, Keisuke Ohdaira1 (JAIST1)

Keywords:フラッシュランプアニール,Asahi type-VU,多結晶Si