The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

06. Thin Films and Surfaces » 6.6 Probe microscopy

[19a-D5-1~12] 6.6 Probe microscopy

Wed. Mar 19, 2014 9:00 AM - 12:15 PM D5 (D207)

10:30 AM - 10:45 AM

△ [19a-D5-6] Reduction of resistance fluctuation of scanning spread resistance microscope

○Kazunori Harada1, Junji Kataoka1, Hidehiko Yabuhara1, Jun Hirota2, Tsukasa Nakai2 (Toshiba Corp. Corporate Manufacturing Engineering Center1, Toshiba Corp. S&S Products Company2)

Keywords:SSRM