9:00 AM - 9:15 AM
[19a-D9-1] Inhibition of copper dissolution by removal of oxidants from rinsing water using noble metal catalysts
Keywords:超純水,腐食
Oral presentation
13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation
Wed. Mar 19, 2014 9:00 AM - 12:30 PM D9 (D315)
9:00 AM - 9:15 AM
Keywords:超純水,腐食