[19a-D9-1~13] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-D9-12] Laser-assisted Atom Probe Analysis of Carbon-doped Silicon

^○Teruyuki Kinno¹, Tomokazu Sasaki², Tadakatsu Ohkubo³, Mitsuhiro Tomita¹, Kazuhiro Hono³ (Toshiba R&D Center¹, Toshiba Nanoanalysis², NIMS³)

Keywords:アトムプローブ,シリコン,不純物