[19a-D9-1~13] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-D9-3] Evaluation Methods for Water Permeation into Fine Pore Patterns

^○Mieko Kashi¹, Takuya Kambayashi¹, Masaki Okawa², Megumi Hamano¹, Toshinori Jin'oka¹, Hiroki Takahashi¹, Katsuhiro Ota¹, Tomonori Saeki¹ (Hitachi Yokohama Research Lab.¹, Kokusai Electric Semiconductor Service²)

Keywords:微細孔,液浸入,蛍光