The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-D9-1~13] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Wed. Mar 19, 2014 9:00 AM - 12:30 PM D9 (D315)

10:45 AM - 11:00 AM

[19a-D9-7] Depth profiles of metals gettered by BMDs in silicon substrates

○Rikiichi Ohno1, Koichiro Saga1 (Sony corp.1)

Keywords:BMD,重金属汚染