The 61st JSAP Spring Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19a-D9-1~13] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Wed. Mar 19, 2014 9:00 AM - 12:30 PM D9 (D315)

11:15 AM - 11:30 AM

[19a-D9-9] New evaluation method for the surface energy of MEMS cantilever

○Ichiroh Kato1 (JAXA1)

Keywords:cantilever,Stiction,surface energy