The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[19a-E13-1~11] 15.4 III-V-group nitride crystals

Wed. Mar 19, 2014 9:00 AM - 12:00 PM E13 (E301)

11:30 AM - 11:45 AM

[19a-E13-10] Characteristics of nitride films etched with Cl2 neutral-beam

Jitsuo Ohta1, Halubai Sekhar2, Tomohiro Kubota2, Takeru Okada2,4, Seiji Samukawa2,3,4, Hiroshi Fujioka1,4 (IIS, The Univ. of Tokyo1, IFS, Tohoku Univ.2, WPI-AIMR, Tohoku Univ.3, JST-CREST4)

Keywords:nitride,エッチング