[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-E14-1] Preparation of hydrogenated amorphous silicon films by the atmospheric pressure CVD using liquid cyclopentasilane

^○Hideyuki Takagishi^1,2, Zhongrong Shen^1,2, Takashi Masuda^1,3, Keisuke Ohdaira^1,2,3, Tatsuya Shimoda^1,2,3 (JAIST¹, JST-ALCA², JAIST-GDRC³)

Keywords:アモルファスシリコン薄膜,大気圧CVD,cyclopentasilane