Crystallization of Amorphous Silicon Thin Films by Microwave Heating

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 9:00 AM - 11:45 AM E14 (E302)

9:15 AM - 9:30 AM

^○（B）Tomohiko Nakamura¹, Shinya Yoshidomi¹, Masahiko Hasumi¹, Toshiyuki Sameshima¹ (TUAT¹)

Keywords:結晶化,crystallization,amorphous