9:30 AM - 9:45 AM
[19a-E14-3] Temperature Analysis of Si Films during Blue Multi-Laser Diode Annealing
Keywords:青色半導体レーザ
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration
Wed. Mar 19, 2014 9:00 AM - 11:45 AM E14 (E302)